Development of Yttrium alloy ion source and its application in nanofabrication

摘要

We present a new YAuSi Liquid Metal Alloy Ion Source (LMAIS), generatingfocused ion beams of yttrium ions, and its prospective applications fornanofabrication, sample preparation, lithographic and implantation processes.Working parameters of the AuSiY LMAIS are similar to other gold-silicon basedLMAIS. We found anomalously high emission current of triple charged Yttriumions. Influence of Yttrium implantation on optical qualities of the implantedion-ensembles is shown in luminescence of co-implanted Erbium ions.